By Meyer Burger Technology
The Hennecke Wafer Measurement System is modular. It combines the advantages of a wafer inspection module and a wafer sorter module.
The measurement system only uses non-contact measurements and minimises the stress on the wafers. The sorter guarantees low breakage rates and fast transportation and sorting.
Facts and figures
- Model: Inline inspection System HE-WI-04
- Market Introduction: 2007
- Purpose: Measurement and wafer sorting
- Main benefits: High accuracy, non-contract measurment, productivity 3,400 wafers per hour, minimum stress on wafers
- Availability: Worldwide
- Sales Partner: Hennecke Systems, Meyer Burger Technology AG
Please do not hesitate to contact us for all complementary information.
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